Published in

American Institute of Physics, AIP Advances, 4(13), 2023

DOI: 10.1063/5.0080674

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Superconducting single-photon detectors fabricated via a focused electron beam-induced deposition process

Journal article published in 2023 by Stephan Steinhauer ORCID, Adrian Iovan ORCID, Samuel Gyger ORCID, Val Zwiller ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Superconducting detectors have become essential devices for high-performance single-photon counting over a wide wavelength range with excellent time resolution. Detector fabrication typically relies on resist-based lithography processes, which can limit possibilities for device integration, e.g., on unconventional substrates. Here, we demonstrate a resist-free fabrication route for realizing superconducting nanowire single-photon detectors based on focused electron beam-induced deposition. Utilizing direct writing of a Pt–C mask, we achieved nanowire meanders with linewidths below 100 nm, operated them as superconducting devices for the detection of visible and near-infrared photons, and showed detector integration on side-polished optical fibers. Being compatible with device fabrication on curved irregular surfaces, our approach could enable superconducting detector integration in complex configurations.