Published in
Elsevier, Materials Letters, (308), p. 131244, 2022
DOI: 10.1016/j.matlet.2021.131244
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Implanted gallium impurity detection in silicon by impedance spectroscopy
Journal article published in 2022 by
David Tetelbaum,
Alena Nikolskaya 
,
Mikhail Dorokhin,
Valery Vasiliev,
Dmitriy Smolyakov,
Anna Lukyanenko,
Filipp Baron,
Anton Tarasov
,
Mikhail Dorokhin,
Valery Vasiliev,
Dmitriy Smolyakov,
Anna Lukyanenko,
Filipp Baron,
Anton Tarasov
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