Published in
Institute of Electrical and Electronics Engineers, IEEE Sensors Journal, 3(23), p. 1885-1895, 2023
DOI: 10.1109/jsen.2022.3229707
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Effect of Si<sup>+</sup> Ion Implantation in α-Ga<sub>2</sub>O<sub>3</sub> Films on Their Gas Sensitivity
Journal article published in 2023 by
Nikita Yakovlev 
,
Aleksei Almaev ,
Pavel Butenko ,
David Tetelbaum,
Alexey Mikhaylov ,
Alena Nikolskaya ,
Aleksei Pechnikov,
Sergey Stepanov,
Mikhail Boiko,
Andrei Chikiryaka,
Vladimir Nikolaev
,
Aleksei Almaev ,
Pavel Butenko ,
David Tetelbaum,
Alexey Mikhaylov ,
Alena Nikolskaya ,
Aleksei Pechnikov,
Sergey Stepanov,
Mikhail Boiko,
Andrei Chikiryaka,
Vladimir Nikolaev
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