Numerical simulation of atomic layer deposition for thin deposit formation in a mesoporous substrate
Journal article published in 2021 by
Liwei Zhuang 
,
Peter Corkery,
Dennis T. Lee ,
Seungjoon Lee ,
Mahdi Kooshkbaghi ,
Zhen‐liang Xu ,
Gance Dai,
Ioannis G. Kevrekidis,
Michael Tsapatsis
,
Peter Corkery,
Dennis T. Lee ,
Seungjoon Lee ,
Mahdi Kooshkbaghi ,
Zhen‐liang Xu ,
Gance Dai,
Ioannis G. Kevrekidis,
Michael Tsapatsis
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