Published in
MAIK Nauka/Interperiodica, Technical Physics Letters, 4(47), p. 301-304, 2021
DOI: 10.1134/s1063785021030275
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Smoothing of Polycrystalline AlN Thin Films with Argon Cluster Ions
Journal article published in 2021 by
I. V. Nikolaev,
N. G. Korobeishchikov,
M. A. Roenko,
P. V. Geydt 
,
V. I. Strunin
,
V. I. Strunin
This paper was not found in any repository, but could be made available legally by the author.
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