Published in
Royal Society of Chemistry, Nanoscale, 11(13), p. 5834-5846, 2021
DOI: 10.1039/d0nr08935d
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Chlorine doping of MoSe2 flakes by ion implantation
Journal article published in 2021 by
Slawomir Prucnal 
,
Arsalan Hashemi,
Mahdi Ghorbani-Asl ,
René Hübner ,
Juanmei Duan,
Yidan Wei ,
Divanshu Sharma,
Dietrich Rt T. Zahn ,
René Ziegenrücker ,
Ulrich Kentsch,
Arkady V. Krasheninnikov ,
Manfred Helm ,
Shengqiang Zhou
,
Arsalan Hashemi,
Mahdi Ghorbani-Asl ,
René Hübner ,
Juanmei Duan,
Yidan Wei ,
Divanshu Sharma,
Dietrich Rt T. Zahn ,
René Ziegenrücker ,
Ulrich Kentsch,
Arkady V. Krasheninnikov ,
Manfred Helm ,
Shengqiang Zhou
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Abstract
Controlled doping of MoSe2 realized by low-energy ion implantation and millisecond-range intense pulse light annealing.