Abstract In this paper, the principle and application of atomic force microscopy (AFM) are reviewed and discussed in detail. Several scientific papers are used to find out data about AFM. The obtained scientific results are summarized to get a better understanding of the method and its application. The application of AFM for corrosion study is discussed in detail, and the possible conclusion is made based on the results of several articles. It is summarized that AFM is an important method to determine the surface phenomena of metal corrosion.