Published in
Royal Society of Chemistry, CrystEngComm, 27(21), p. 4036-4041, 2019
DOI: 10.1039/c9ce00463g
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Anisotropic mosaicity and lattice-plane twisting of an m-plane GaN homoepitaxial layer
Journal article published in 2019 by
Jaemyung Kim,
Okkyun Seo 
,
Atsushi Tanaka,
Jun Chen,
Kenji Watanabe ,
Yoshio Katsuya ,
Toshihide Nabatame,
Yoshihiro Irokawa,
Yasuo Koide,
Osami Sakata
,
Atsushi Tanaka,
Jun Chen,
Kenji Watanabe ,
Yoshio Katsuya ,
Toshihide Nabatame,
Yoshihiro Irokawa,
Yasuo Koide,
Osami Sakata
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Abstract
We have observed anisotropic mosaicity of an m-plane GaN homoepitaxial layer by X-ray diffraction topography imaging over a wafer and X-ray rocking curves measured at various wafer points.