Lattice-plane orientation mapping of homo-epitaxial GaN(0001) thin films via grazing-incidence X-ray diffraction topography in 2-in. wafer
Journal article published in 2018 by
Jaemyung Kim,
Okkyun Seo 
,
Chulho Song,
Satoshi Hiroi,
Yanna Chen,
Yoshihiro Irokawa,
Toshihide Nabatame,
Yasuo Koide,
Osami Sakata
,
Chulho Song,
Satoshi Hiroi,
Yanna Chen,
Yoshihiro Irokawa,
Toshihide Nabatame,
Yasuo Koide,
Osami Sakata
This paper is made freely available by the publisher.
Full text: Download
Published version:
archiving forbidden
Data provided by 