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American Scientific Publishers, Journal of Nanoscience and Nanotechnology, 10(18), p. 7124-7127

DOI: 10.1166/jnn.2018.15483

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Impact of Plasmonic Parameters on 7-nm Patterning in Plasmonic Computational Lithography

Journal article published in 2018 by Sang-Kon Kim
Distributing this paper is prohibited by the publisher
Distributing this paper is prohibited by the publisher

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