Published in
American Institute of Physics, Journal of Vacuum Science and Technology A, 4(36), p. 041503
DOI: 10.1116/1.5034097
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Comparison of thermal and plasma-enhanced atomic layer deposition of niobium oxide thin films
Journal article published in 2018 by
Saravana Balaji Basuvalingam 
,
Bart Macco,
Harm C. M. Knoops,
Jimmy Melskens,
Wilhelmus M. M. (Erwin) Kessels,
Ageeth A. Bol
,
Bart Macco,
Harm C. M. Knoops,
Jimmy Melskens,
Wilhelmus M. M. (Erwin) Kessels,
Ageeth A. Bol
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
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