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The qm/mm design of precursors for cvd and ald processes

Proceedings article published in 2005 by A. Y.-U. Rogachev, S. Konyuhov, A. Bochenkova, N. P. Kuzmina ORCID, A. Nemukhin
This paper was not found in any repository; the policy of its publisher is unknown or unclear.
This paper was not found in any repository; the policy of its publisher is unknown or unclear.

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Question mark in circle
Preprint: policy unknown
Question mark in circle
Postprint: policy unknown
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Published version: policy unknown