Selective wet etching of AlInN layers for nitride-based MEMS and photonic device structures - art. no. 69930E
Book chapter published in 2008 by
I. M. Watson,
C. Xiong,
E. Gu,
M. D. Dawson,
F. Rizzi,
K. Bejtka,
P. R. Edwards,
R. W. Martin 
