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Society of Photo-optical Instrumentation Engineers, Proceedings of SPIE, 2014

DOI: 10.1117/12.2057468

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New metrology techniques improve the production of silicon diffractive optics

Proceedings article published in 2014 by Cynthia B. Brooks, Michael Gully-Santiago ORCID, Michelle Grigas, Daniel T. Jaffe
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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