Published in
Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation
DOI: 10.1117/12.2056912
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High performance Si immersion gratings patterned with electron beam lithography
Proceedings article published in 2014 by
Michael A. Gully-Santiago 
,
Daniel T. Jaffe,
Cynthia B. Brooks,
Daniel W. Wilson,
Richard E. Muller
,
Daniel T. Jaffe,
Cynthia B. Brooks,
Daniel W. Wilson,
Richard E. Muller
This paper was not found in any repository, but could be made available legally by the author.
Full text: Unavailable
Preprint: archiving forbidden
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