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Advanced Ceramic Materials, 3A(2), p. 257-263

DOI: 10.1111/j.1551-2916.1987.tb00091.x

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Amorphous Titanium Carbide Films Produced by Low-Temperature Organometallic CVD

Journal article published in 1987 by Alain E. Kaloyeros, Wendell S. Williams, Clare M. Allocca ORCID, Deborah M. Pollina, Gregory S. Girolami
Distributing this paper is prohibited by the publisher
Distributing this paper is prohibited by the publisher

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