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Optica, Optics Express, 5(18), p. 4790, 2010

DOI: 10.1364/oe.18.004790

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Optofluidic notch filter integration by lift-off of thin films

Journal article published in 2010 by Brian S. Phillips, Philip Measor, Yue Zhao, Holger Schmidt, Aaron R. Hawkins ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

Optofluidic platforms used for biomolecular detection require spectral filtering for distinguishing analyte signals from unwanted background. Towards a fully integrated platform, an on-chip filter is required. Selective deposition of dielectric thin films on an optofluidic sensor based on antiresonant reflecting optical waveguide (ARROW) technology provides the means for localized, on-chip optical filtering. We present a lift-off technique, compatible with thin-film processing including plasma-enhanced chemical vapor and sputtering deposition. The resulting optofluidic notch filters exhibited a 20 dB rejection with linewidths as low as 20 nm for approximately 1 cm long chips consisting of liquid-core and solid-core waveguides.