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IOP Publishing, Journal of Micromechanics and Microengineering, 3(25), p. 035023

DOI: 10.1088/0960-1317/25/3/035023

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Characterization of the Young’s modulus, residual stress and fracture strength of Cu–Sn–In thin films using combinatorial deposition and micro-cantilevers

Distributing this paper is prohibited by the publisher
Distributing this paper is prohibited by the publisher

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