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IOP Publishing, Journal of Micromechanics and Microengineering, 11(20), p. 115008, 2010

DOI: 10.1088/0960-1317/20/11/115008

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Optimized piranha etching process for SU8-based MEMS and MOEMS construction

Journal article published in 2010 by Matthew Holmes, Jared Keeley, Katherine Hurd, Holger Schmidt, Aaron Hawkins ORCID
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This paper is available in a repository.

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Abstract

We demonstrate the optimization of the concentration, temperature and cycling of a piranha (H(2)O(2):H(2)SO(4)) mixture that produces high yields while quickly etching hollow structures made using a highly crosslinked SU8 polymer sacrificial core. The effects of the piranha mixture on the thickness, refractive index and roughness of common micro-electromechanical systems and micro-opto-electromechanical systems fabrication materials (SiN, SiO(2) and Si) were determined. The effectiveness of the optimal piranha mixture was demonstrated in the construction of hollow anti-resonant reflecting optical waveguides.