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Institute of Electrical and Electronics Engineers, IEEE Photonics Technology Letters, 15(22), p. 1147-1149, 2010

DOI: 10.1109/lpt.2010.2051145

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Hollow ARROW Waveguides on Self-Aligned Pedestals for Improved Geometry and Transmission

Journal article published in 2010 by Evan J. Lunt, Bin Wu, Jared M. Keeley, Philip Measor, Holger Schmidt, Aaron R. Hawkins ORCID
This paper is available in a repository.
This paper is available in a repository.

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Abstract

Micrometer-sized hollow antiresonant reflecting optical waveguides on silicon substrates have been previously demonstrated with liquid and gas-filled cores. Previous designs have nonideal geometries, with nonuniform lateral layers around the hollow core, resulting in higher loss than could potentially be achieved. A new design and fabrication process has been developed involving hollow waveguide fabrication on a self-aligned pedestal (SAP) using anisotropic plasma etching. With the SAP structure, the hollow core is surrounded by uniform layers and a terminal layer of air on three sides, resulting in air-core waveguide loss of 1.54 cm-1 at 785 nm and high fabrication yield.