Published in
Wiley, physica status solidi (a) – applications and materials science, 9(204), p. 2854-2859, 2007
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Study of the CVD process sequences for an improved control of the Bias Enhanced Nucleation step on silicon
Journal article published in 2007 by
S. Saada,
J. C. Arnault,
N. Tranchant,
M. Bonnauron,
P. Bergonzo 
This paper was not found in any repository, but could be made available legally by the author.
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