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American Institute of Physics, Applied Physics Letters, 23(96), p. 231908

DOI: 10.1063/1.3449126

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Microstructure of gallium nitride films grown on silicon (110)

Journal article published in 2010 by F. Ruiz Zepeda, O. Contreras, A. Dadgar ORCID, A. Krost
This paper is available in a repository.
This paper is available in a repository.

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Abstract

The microstructure of GaN layers grown on Si(110) is studied by transmission electron microscopy. The GaN layers were grown by metal-organic vapor phase epitaxy using low-temperature AlN interlayers and a high-temperature AlN seed layer. Anisotropic misfit strain originating at the AlN/Si(110) interface is notably reflected in the microstructure of the GaN layers. The stress produced in GaN/Si(110) films is relieved by bending of edge type threading dislocations over the basal plane, generating horizontal segments aligned all along the closely lattice matched direction [100]. It is proposed that the horizontal defects are generated by a driven force with glide- and climb-components manifested on some of the prismatic slip planes of GaN. The general mechanism of the change in the propagation direction of dislocations is discussed.