Atom probe tomography, APT, is the only microstructural method that can routinely analyse and position individual atoms in a material with a spatial resolution of 0.1–0.5 nm. Recent implementation of pulsed-laser to APT made investigation of less conducting materials, such as oxides, feasible. In this paper a short description of the principle of the techniques is presented, followed by examples of recent APT studies of thermally grown oxide scales produced on alumina formers (Pt-modified NiAl diffusion coating and FeCrAl alloy), at the crack tips in a Ni-based alloy and on a Zr-alloy. Additionally, results from preliminary studies of ZnO and MgO bulk materials are shown. The obtained information on the atomic scale about the chemistry variations in the scales and at the metal oxide interfaces provides valuable insights into oxidation processes.