A facile route to metallic nano- and microstructures of varying size and geometry is reported. Both nanoparticle formations as well as continuous structures are formed spontaneously on Ge(111) substrates via galvanic displacement from aqueous metal salt solutions. Utilizing an atomic force microscope, patterning is achieved via static plowing lithography through a thin polymeric photoresist. Metal deposition proceeds on exposed portions of the substrate, and the resist is subsequently removed to yield the desired metallic features.