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A vertical-cavity surface-emitting laser with a monolithically integrated electro-optical modulator (EOM VCSEL) is fabricated using metal-organic vapor phase epitaxy. 3 dB extinction ratio of the modulator at a very low power consumption and open-eye operation of the EOM VCSEL at 10 Gb/s is demonstrated. The modulation of the 845 nm output is temperature-stable up to 85 °C. (© 2010 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)