AbstractThis research work presents a comprehensive and quantitative analysis of micro-crack formation, in terms of length and number of micro-cracks formed on the machined surface of pure titanium. The effect of processing parameters on micro-crack formation was studied through scanning electron microscope. The results indicate that the micro-crack formation is the best represented in terms of average crack length. Statistical analysis of the results shows that pulse on time, pulse off time and peak current significantly deteriorate the microstructure of machined surfaces which produces the deeper, wider globules of debris and micro cracks. The compounds like titanium dioxide (rutile) (TiO₂), (TiO_0.325), Ti₂O_3, Ilmenite (Fe₂Ti₄O), titanium carbides (TiC) and copper titanium dioxide (Cu₃TiO₄) were formed due to phase transformations that were analyzed through X-ray diffraction and energy dispersive X-ray method.