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Laser Micromachining for Optoelectronic Device Fabrication
DOI: 10.1117/12.468235
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Three-dimensional microfabrication with femtosecond laser pulses
Proceedings article published in 2003 by
Jesper Serbin,
R. Houbertz,
Carsten Fallnich,
Boris N. Chichkov
This paper was not found in any repository, but could be made available legally by the author.
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