Published in
IOP Publishing, Nanotechnology, 6(21), p. 065305, 2010
DOI: 10.1088/0957-4484/21/6/065305
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Generic nano-imprint process for fabrication of nanowire arrays
Journal article published in 2010 by
Aurélie Pierret 
,
Moïra Hocevar,
Sl Silke Diedenhofen,
Silke L. Diedenhofen,
Re Rienk Algra,
Rienk E. Algra,
E. Elias Vlieg,
Ec Eugene Timmering,
Eugene C. Timmering,
Marc A. Verschuuren,
Ma Marcel Verschuuren,
George Wgg G. Immink,
Ma Marcel Verheijen,
Marcel A. Verheijen,
Epam Erik Bakkers
and other authors.
,
Moïra Hocevar,
Sl Silke Diedenhofen,
Silke L. Diedenhofen,
Re Rienk Algra,
Rienk E. Algra,
E. Elias Vlieg,
Ec Eugene Timmering,
Eugene C. Timmering,
Marc A. Verschuuren,
Ma Marcel Verschuuren,
George Wgg G. Immink,
Ma Marcel Verheijen,
Marcel A. Verheijen,
Epam Erik Bakkers
and other authors.
This paper is available in a repository.
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