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Sheng-Yu Chen
Su et al., 2020
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@article{Su2020, author = {Su, Longxing and Chen, Sheng-Yu and Zhao, Lianqi and Zuo, Yuqing and Xie, Jin}, month = {jan}, title = {Low temperature atomic layer deposition of GaOxNy thin film on III-GaN: Mg for UV photodetector}, year = {2020} }
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Low temperature atomic layer deposition of GaOxNy thin film on III-GaN: Mg for UV photodetector
Journal article published in 2020 by
Longxing Su
,
Sheng-Yu Chen
,
Lianqi Zhao
,
Yuqing Zuo
,
Jin Xie
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