Published in

SpringerOpen, Nano Convergence, 1(10), 2023

DOI: 10.1186/s40580-023-00387-1

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Unveiling the mechanism of remote epitaxy of crystalline semiconductors on 2D materials-coated substrates

Journal article published in 2023 by Xuejing Wang, Joonghoon Choi, Jinkyoung Yoo ORCID, Young Joon Hong
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

AbstractRemote epitaxy has opened novel opportunities for advanced manufacturing and heterogeneous integration of two-dimensional (2D) materials and conventional (3D) materials. The lattice transparency as the fundamental principle of remote epitaxy has been studied and challenged by recent observations defying the concept. Understanding remote epitaxy requires an integrated approach of theoretical modeling and experimental validation at multi-scales because the phenomenon includes remote interactions of atoms across an atomically thin material and a few van der Waals gaps. The roles of atomically thin 2D material for the nucleation and growth of a 3D material have not been integrated into a framework of remote epitaxy research. Here, we summarize studies of remote epitaxy mechanisms with a comparison to other epitaxy techniques. In the end, we suggest the crucial topics of remote epitaxy research for basic science and applications. Graphical Abstract