Published in

Springer Nature [academic journals on nature.com], Light: Science and Applications, 1(12), 2023

DOI: 10.1038/s41377-023-01198-z

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Deep learning enables nanoscale X-ray 3D imaging with limited data

Journal article published in 2023 by Chonghang Zhao ORCID, Hanfei Yan ORCID
This paper is made freely available by the publisher.
This paper is made freely available by the publisher.

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Abstract

AbstractDeep neural network can greatly improve tomography reconstruction with limited data. A recent effort of combining ptycho-tomography model with the 3D U-net demonstrated a significant reduction in both the number of projections and computation time, and showed its potential for integrated circuit imaging that requires high-resolution and fast measurement speed.