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American Chemical Society, ACS Applied Materials and Interfaces, 50(15), p. 57960-57969, 2023

DOI: 10.1021/acsami.3c09863

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High Aspect Ratio Nanoscale Pores through BCP-Based Metal Oxide Masks and Advanced Dry Etching

Journal article published in 2023 by Aislan Esmeraldo Paiva ORCID, Michael S. Gerlt ORCID, Nino F. Läubli, Nadezda Prochukhan ORCID, Jhonattan Frank Baez Vasquez, Gabriele S. Kaminski Schierle ORCID, Michael A. Morris
This paper was not found in any repository, but could be made available legally by the author.
This paper was not found in any repository, but could be made available legally by the author.

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