Published in
Elsevier, Surface and Coatings Technology, (418), p. 127237, 2021
DOI: 10.1016/j.surfcoat.2021.127237
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Evolution of the microstructure of sputter deposited TaAlON thin films with increasing oxygen partial pressure
Journal article published in 2021 by
Nina Schalk,
Christian Saringer,
Alexander Fian,
Velislava L. Terziyska,
Jaakko Julin 
,
Michael Tkadletz
,
Michael Tkadletz
This paper was not found in any repository, but could be made available legally by the author.
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