Published in
2018 22nd International Conference on Ion Implantation Technology (IIT), 2018
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Platinum in Silicon after Post-Implantation Annealing: From Experiments to Process and Device Simulations
Proceedings article published in 2018 by
Moritz Hauf,
Gerhard Schmidt,
Franz-Josef Niedernostheide,
Anna Johnsson,
Peter Pichler
This paper was not found in any repository, but could be made available legally by the author.
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