Royal Society of Chemistry, Nanoscale, 32(11), p. 15184-15194, 2019
DOI: 10.1039/c9nr03995c
Full text: Unavailable
The mechanical properties of ultrathin Si nanomembranes having thicknesses of 2 to 35 nm have been investigated by determining biaxial Young's modulus. The nanomembrane sample with thickness of 2 nm showed very low modulus value of 3.25 GPa.